MY PI2025005688 20250919 JP 2024-169153 20240927 HIRATA CORPORATION
111 Hitotsugi, Ueki-machi, Kita-ku, Kumamoto-shi, Kumamoto-ken JP
JP Yasuaki KUROKI
c/o HIRATA CORPORATION, 111 Hitotsugi, Ueki-machi, Kita-ku, Kumamoto-shi, Kumamoto-ken JP
Takuya TOJO
c/o HIRATA CORPORATION, 111 Hitotsugi, Ueki-machi, Kita-ku, Kumamoto-shi, Kumamoto-ken JP
Yasuaki ODA
c/o HIRATA CORPORATION, 111 Hitotsugi, Ueki-machi, Kita-ku, Kumamoto-shi, Kumamoto-ken JP
TIMOTHY SIAW YEAN HWA
C/O SHEARN DELAMORE & CO., 7TH FLOOR, WISMA HAMZAH-KWONG HING, NO. 1, LEBOH AMPANG 50100 KUALA LUMPUR MY
WORK APPARATUS AND CARRY-IN/OUT APPARATUS 20250919 20260327

A work apparatus comprises a carry-in/out mechanism and a moving mechanism for moving the carry-in/out mechanism, wherein the carry-in/out mechanism includes a substrate support member for supporting a substrate, an advancement/retraction mechanism configured to advance/retract the substrate support member, a substrate conveyance mechanism for conveying the substrate, and a lifting/lowering mechanism configured to lift/lower the substrate conveyance mechanism, the advancement/retraction mechanism includes a base end portion support member for supporting a base end portion of the substrate support member, and a drive portion for moving the base end portion support member, the base end portion is provided at an end portion of the substrate support member, and the lifting/lowering mechanism lifts/lowers the substrate conveyance mechanism and thereby the substrate is transferred between the substrate support member and the substrate conveyance mechanism. Figure 1.