Application Type
National
Application SubType
(10) Registration Number and Date
10202401107S
Status
ACTIVE ( Other event occurred)
(180) Expiration Date
(20) Filing Number and Date
SG 10202401107S 2023.12.31
(40) Publication Number and Date
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(85) National Entry Date
(30) Priority Details
KR
KR10-2023-0050359
2023.01.01
(51) IPC Classes
(71/73) Applicant
(72) Inventor
(74) Representative
(54) Title
(57) Abstract
(EN) ABSTRACT A method of fabricating a blank mask, the method including: forming a light-shielding film on a light-transmissive substrate; and cleaning the light-shielding film with a cleaning solution, wherein in the cleaning, the light-shielding film has a thickness change of less than 5 nm. 5 (Fig. 1) 48
(58) Citations
License Details
(98) Annuity Details
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